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OXIDE MATERIALS
SINGLE CRYSTAL GROWTH SYSTEM
TCH-20
Characteristics
Precisely controls temperature and driving.
Improves working efficiency thanks to front-open-door type cooling water jacket chamber.
Designed with the concept of achieving lighter weight of the equipment and of improving performance.
Specification
| model |
TCH-20 |
| - |
CZ |
EFG |
| Heating temperature |
2100°C |
| Crucible size |
ø150mm*150mmH |
| Pulling rod stroke |
700mm(Max.) |
900mm(Max.) |
| Pulling rod elevation speed |
0.2-10mm/h |
| Pulling rod rotation speed |
60rpm |
none |
| Pulling rod rotation angle |
None |
±15° |
| Pulling rod X-Y drive stroke |
None |
±15° |
| R.F coil stroke |
100mm |
| load cell span |
20N , 50N , 100N |
| R.F generator output |
50Kw |
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